Micromilling of Metal Alloys with Focused Ion Beam-Fabricated Tools
Description:
This work combines focused ion beam sputtering and ultra-precision machining as a first step in fabricating microstructure in metals and alloys. Specifically, {approx}25{micro}m diameter micro-end mills are made from cobalt M42 high-speed steel and C2 micrograin tungsten carbide tool blanks by ion beam sputtering. A 20 keV focused gallium beam defines tool cutting edges having radii of curvature < 0.1{micro}m. Micro-end mills having 2, 4 and 5 cutting edges successfully machine small trenche…
more
Date:
November 5, 1999
Creator:
ADAMS,DAVID P.; VASILE,M.J.; BENAVIDES,GILBERT L. & CAMPBELL,ANN N.
Item Type:
Refine your search to only
Article