Micromilling of Metal Alloys with Focused Ion Beam-Fabricated Tools

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Description

This work combines focused ion beam sputtering and ultra-precision machining as a first step in fabricating microstructure in metals and alloys. Specifically, {approx}25{micro}m diameter micro-end mills are made from cobalt M42 high-speed steel and C2 micrograin tungsten carbide tool blanks by ion beam sputtering. A 20 keV focused gallium beam defines tool cutting edges having radii of curvature < 0.1{micro}m. Micro-end mills having 2, 4 and 5 cutting edges successfully machine small trenches in 6061-T4 aluminum, brass, 4340 steel and polymethyl methacrylate. Machined trench widths are approximately equal to the tool diameters and surface roughnesses (rms) are {approx}150 nm or ... continued below

Physical Description

12 p.

Creation Information

ADAMS,DAVID P.; VASILE,M.J.; BENAVIDES,GILBERT L. & CAMPBELL,ANN N. November 5, 1999.

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This article is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. It has been viewed 18 times . More information about this article can be viewed below.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM, and Livermore, CA (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

This work combines focused ion beam sputtering and ultra-precision machining as a first step in fabricating microstructure in metals and alloys. Specifically, {approx}25{micro}m diameter micro-end mills are made from cobalt M42 high-speed steel and C2 micrograin tungsten carbide tool blanks by ion beam sputtering. A 20 keV focused gallium beam defines tool cutting edges having radii of curvature < 0.1{micro}m. Micro-end mills having 2, 4 and 5 cutting edges successfully machine small trenches in 6061-T4 aluminum, brass, 4340 steel and polymethyl methacrylate. Machined trench widths are approximately equal to the tool diameters and surface roughnesses (rms) are {approx}150 nm or less. Microtools are robust and operate for more than 6 hours without fracture. Results from ultra-precision machining aluminum at feed rates as high as 50 mm/minute are included.

Physical Description

12 p.

Notes

OSTI as DE00014823

Medium: P; Size: 12 pages

Source

  • Journal Name: Journal of Microelectromechanical Systems; Other Information: Submitted to Journal of Microelectromechanical Systems

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Identifier

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  • Report No.: SAND99-2845J
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 14823
  • Archival Resource Key: ark:/67531/metadc618508

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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Creation Date

  • November 5, 1999

Added to The UNT Digital Library

  • June 16, 2015, 7:43 a.m.

Description Last Updated

  • April 6, 2017, 8:22 p.m.

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ADAMS,DAVID P.; VASILE,M.J.; BENAVIDES,GILBERT L. & CAMPBELL,ANN N. Micromilling of Metal Alloys with Focused Ion Beam-Fabricated Tools, article, November 5, 1999; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc618508/: accessed October 21, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.