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Three-degree-of-freedom optic mount for extreme ultraviolet lithography

Description: A mechanism to finely align optics for extreme ultraviolet lithography applications is presented. The mechanism is a small motion parallel link manipulator with flexure joints that exhibits nanometer level positioning capability. Performance results of a prototype system are given in this paper.
Date: August 27, 1998
Creator: Hale, L.; Jensen, S.; Malsbury, T.; Parker, J. & Tajbakhsh, H.
Item Type: Refine your search to only Article
Partner: UNT Libraries Government Documents Department
open access

Optical engineering

Description: The Optical Engineering thrust area at Lawrence Livermore National Laboratory (LLNL) was created in the summer of 1996 with the following main objectives: (1) to foster and stimulate leading edge optical engineering research and efforts key to carrying out LLNL's mission and enabling major new programs; (2) to bring together LLNL's broad spectrum of high level optical engineering expertise to support its programs. Optical engineering has become a pervasive and key discipline, with applications … more
Date: January 1, 1998
Creator: Saito, T T
Item Type: Refine your search to only Report
Partner: UNT Libraries Government Documents Department
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Adaptive optics instrument for long-range imaging. Final report

Description: The science and history of imaging through a turbulent atmosphere is reviewed in detail. Traditional methods for reducing the effects of turbulence are presented. A simplified method for turbulence reduction called the Sheared Coherent Interferometric Photography (SCIP) method is presented. Implementation of SCIP is discussed along with experimental results. Limitations in the use of this method are discussed along with recommendations for future improvements.
Date: June 1, 1998
Creator: Crawford, Thomas M.
Item Type: Refine your search to only Report
Partner: UNT Libraries Government Documents Department
open access

Precision assembly and alignment of large optic modules for the National Ignition Facility

Description: The National Ignition Facility (NIF), currently under design and construction at Lawrence Livermore National Laboratory (LLNL), will be the world`s biggest laser. The optics for the multipass, 192-beam, high-power, neodymium-glass laser will be assembled and aligned in the NIF Optics Assembly Building (OAB), adjacent to the huge Laser and Target Area Building (LTAB), where they will be installed. To accommodate the aggressive schedule for initial installation and activation, rapid assembly and … more
Date: May 12, 1998
Creator: Hurst, P. & Grasz, E.
Item Type: Refine your search to only Article
Partner: UNT Libraries Government Documents Department
open access

Development of compact extreme ultraviolet interferometry for on-line test of lithography cameras

Description: Extreme ultraviolet lithography (EUVL) is a candidate technology for the microelectronics industry with design rules for 0.1 {micro}m features and beyond. When characterizing an extreme ultraviolet (EUV) lithographic optical system, visible light interferometry is limited to measuring wavefront aberration caused by surface figure error while failing to measure wavefront errors induced by the multilayer coatings. This fact has generated interest in developing interferometry at an EUV camera`s op… more
Date: December 31, 1998
Creator: Ray-Chaudhuri, A. K.; Nissen, R. P.; Krenz, K. D.; Stulen, R. H.; Sweatt, W. C.; Warren, M. E. et al.
Item Type: Refine your search to only Report
Partner: UNT Libraries Government Documents Department
open access

High-resolution imaging of early-time imprinting using normal-incidence multilayer mirrors. Final report

Description: A normal-incidence multilayer mirror telescope was designed, fabricated, and tested. The telescope consisted of a primary mirror and a secondary mirror in a Cassegrain optical configuration. The mirrors had multilayer coatings that efficiently reflected the soft x-ray radiation in a narrow bandpass centered at a wavelength of 48 {angstrom}. The telescope was taken to the Laboratory for Laser Energetics (LLE) on October 28, 1996. The telescope was mounted in a TIM instrument module on the OMEGA … more
Date: May 1, 1998
Creator: Seely, J.F.
Item Type: Refine your search to only Report
Partner: UNT Libraries Government Documents Department
open access

Modeling of laser energy concentration in narrow gap joints

Description: A three-dimensional, computer based, optical ray tracing model is used to simulate the combined effect of key geometric parameters for laser welding. This allows one to characterize a range of joint designs for their ability to concentrate or dissipate laser energy. The effects of angle dependent absorption and diffuse reflections on beam transport are evaluated through simulation to determine the contributions of these effects on the system. The effects of energy loss through weld joint gaps a… more
Date: December 1, 1998
Creator: Milewski, J.O. & Mustaleski, T.M.
Item Type: Refine your search to only Article
Partner: UNT Libraries Government Documents Department
open access

Fabrication and testing of optics for EUV projection lithography

Description: Extreme Ultraviolet Lithography (EUVL) is a leading candidate as a stepper technology for fabricating the ``0.1 {micro}m generation`` of microelectronic circuits. EUVL is an optical printing technique qualitatively similar to Deep UV Lithography (DUVL), except that 11-13nm wavelength light is used instead of 193-248nm. The feasibility of creating 0.l{micro}m features has been well-established using small-field EWL printing tools, and development efforts are currently underway to demonstrate tha… more
Date: March 13, 1998
Creator: Taylor, J. S.
Item Type: Refine your search to only Article
Partner: UNT Libraries Government Documents Department
open access

Analysis of thermal issues associated with the pre-amplifier modules in the National Ignition Facility

Description: The design of the National Ignition Facility (NIF) calls for a desired temperature field of 20.00 {+-} 0.28 C throughout the facility. This design requirement is needed to prevent degradation of the operating performance and net yield of the NIF by heat loads generated within the facility. In particular, the potential interference of waste heat from the lighting fixtures and equipment such as the electronics racks, and pre-amplifier modules (PAMs), and its impact on the operational performance … more
Date: December 31, 1998
Creator: Lam, K.L.
Item Type: Refine your search to only Report
Partner: UNT Libraries Government Documents Department
open access

Optical System Design of the National Ignition Facility

Description: The National Ignition Facility (NIF) is a laser fusion facility being constructed at Lawrence Liver-more National Laboratory (LLNL). The neodymium-doped phosphate glass pulsed laser system will produce over 3.5MJ of laser energy at a fundamental lasing wavelength of 1.053pm (1 o). The final optics assembly contains a pair of crystals (KDPKD*P) and a focusing lens to convert the light by sum-frequency-mixing to 30 (h=0,35pm) and focus 1 .SM.J onto the target. The NIF optical system is large and … more
Date: June 26, 1998
Creator: English, R E; Laumann, C W; Miller, J L & Seppala, L G
Item Type: Refine your search to only Article
Partner: UNT Libraries Government Documents Department
open access

Phase retrieval techniques for adaptive optics

Description: We have developed and tested a method for minimizing static aberrations in adaptive optics systems. In order to correct the static phase aberrations, we need to measure the aberrations through the entire system. We have employed various phase retrieval algorithms to detect these aberrations. We have performed simulations of our experimental setup demonstrating that phase retrieval can improve the static aberrations to below the 20 nm rms level, with the limiting factor being local turbulence in… more
Date: March 1, 1998
Creator: Carrano, C. J., LLNL
Item Type: Refine your search to only Article
Partner: UNT Libraries Government Documents Department
open access

Design of precision mounts for optimizing the conversion efficiency of KDP crystals for the National Ignition Facility

Description: A key design challenge for the National Ignition Facility (NIF), being constructed at Lawrence Livermore National Laboratory (LLNL), [Hibbard, R L , 1998], is the frequency converter consisting of two KDP crystals and a focusing lens Frequency conversion is a critical performance factor for NIF and the optical mount design for this plays a key role in meeting design specifications The frequency converter is a monolithic cell that mounts the optics and is the point on the beamline where the freq… more
Date: March 30, 1998
Creator: Hibbard, R. L.
Item Type: Refine your search to only Article
Partner: UNT Libraries Government Documents Department
open access

Instrumentation of LOTIS: Livermore Optical Transient Imaging System; a fully automated wide field of view telescope system searching for simultaneous optical counterparts of gamma ray bursts

Description: LOTIS is a rapidly slewing wide-field-of-view telescope which was designed and constructed to search for simultaneous gamma-ray burst (GRB) optical counterparts. This experiment requires a rapidly slewing ({lt} 10 sec), wide-field-of-view ({gt} 15{degrees}), automatic and dedicated telescope. LOTIS utilizes commercial tele-photo lenses and custom 2048 x 2048 CCD cameras to view a 17.6 x 17.6{degrees} field of view. It can point to any part of the sky within 5 sec and is fully automated. It is c… more
Date: March 6, 1998
Creator: Park, H. S.; Ables, E.; Barthelmy, S. D.; Bionta, R. M.; Ott, L. L.; Parker, E. L. et al.
Item Type: Refine your search to only Article
Partner: UNT Libraries Government Documents Department
open access

Laser-sheet imaging of HE-driven interfaces

Description: This is the final report of a three-year, Laboratory Directed Research and Development (LDRD) project at Los Alamos National Laboratory (LANL). The authors made substantial progress in developing the MILSI (Multiple Imaging of Laser-Sheet Illumination) technique for high explosive (HE)-driven fluid interfaces. They observed the instability, but have not yet measured the instability growth rate. They developed suitable sample containers and optical systems for studying the Rightmyer-Meshkov inst… more
Date: December 31, 1998
Creator: Benjamin, R.F.; Rightley, P.M.; Kinkead, S.; Martin, R.A.; Critchfield, R.; Sandoval, D.L. et al.
Item Type: Refine your search to only Report
Partner: UNT Libraries Government Documents Department
open access

A tangentially viewing VUV TV system for the DIII-D divertor

Description: A video camera system capable of imaging VUV emission in the 120--160 nm wavelength range, from the entire divertor region in the DIII-D tokamak, was designed. The new system has a tangential view of the divertor similar to an existing tangential camera system which has produced two dimensional maps of visible line emission (400--800 nm) from deuterium and carbon in the divertor region. However, the overwhelming fraction of the power radiated by these elements is emitted by resonance transition… more
Date: July 1, 1998
Creator: Nilson, D.G.; Ellis, R.; Fenstermacher, M.E.; Brewis, G. & Jalufka, N.
Item Type: Refine your search to only Article
Partner: UNT Libraries Government Documents Department
open access

Robust tracking with spatio-velocity snakes: Kalman filtering approach

Description: Using results from robust Kalman filtering, we present a new Kalman filter-based snake model for tracking of nonrigid objects in combined spatio-velocity space. The proposed model is the stochastic version of the velocity snake, an active contour model for combined tracking of position and velocity of nonrigid boundaries. The proposed model uses image gradient and optical flow measurements along the contour as system measurements. An optical-flow based measurement error is used to detect and re… more
Date: December 31, 1998
Creator: Peterfreund, N.
Item Type: Refine your search to only Article
Partner: UNT Libraries Government Documents Department
open access

Vibration characteristics of an APS lab facility in Building 401

Description: The vibratory behavior of a lab facility located in Building 401 of the Advanced Photon Source site at Argonne National Laboratory is summarized. Measurements of ambient vibration indicate that acceptable displacement levels are usually maintained (rms value below 0.1 microns) for the measured frequency range, above 0.2 Hz. An exception occurs when strong wind conditions excite a horizontal building resonance near 1.85 Hz to rms levels as high as 0.3 microns. Measurements of the laboratory floo… more
Date: January 1, 1998
Creator: Royston, T.J.
Item Type: Refine your search to only Report
Partner: UNT Libraries Government Documents Department
open access

Neutron scattering instruments of the Spallation Neutron Source

Description: The Spallation Neutron Source (SNS) is an accelerator-based short-pulse neutron scattering facility designed to meet the needs of the neutron scattering community in the US well into the next century. SNS is a US Department of Energy (DOE) construction project that is planned to be completed at Oak Ridge National Laboratory late in 2005. SNS is being designed and will be constructed by a 5-laboratory collaboration including Argonne National Laboratory, Brookhaven National Laboratory, Lawrence B… more
Date: July 1, 1998
Creator: Crawford, R. K. & Herwig, K. W.
Item Type: Refine your search to only Article
Partner: UNT Libraries Government Documents Department
open access

High-power extreme ultraviolet source based on gas jets

Description: The authors report on the development of a high power laser plasma Extreme Ultraviolet (EUV) source for Extreme Ultraviolet Lithography. The source is based on the plasma emission of a recycled jet beam of large Xe clusters and produces no particulate debris. The source will be driven by a pulsed laser delivering 1,500 W of focused average power to the cluster jet target. To develop condensers and to optimize source performance, a low power laboratory cluster jet prototype has been used to stud… more
Date: March 1, 1998
Creator: Kubiak, G.D.; Bernardez, L.J. & Krenz, K.
Item Type: Refine your search to only Article
Partner: UNT Libraries Government Documents Department
open access

XOP: Recent developments

Description: XOP (X-ray OPtics utilities) is a graphical user interface (GUI) to run computer programs which calculate basic information needed by synchrotron radiation beamline scientists and engineers. It can also be used as a front-end for specific codes or packages for data analysis and data reduction (XAFS, surface crystallography, etc.). XOP contains a customized database for optical and atomic constants. It has a flexible design and new applications may be added. The capabilities of XOP including tho… more
Date: September 1, 1998
Creator: Sanchez del Rio, M. & Dejus, R. J.
Item Type: Refine your search to only Article
Partner: UNT Libraries Government Documents Department
open access

Progress towards sub-micron hard x-ray imaging using elliptically bent mirrors and its applications

Description: The authors have developed an x-ray micro-probe facility utilizing mirror bending techniques that allow white light x-rays (4--12keV) from the Advanced light Source Synchrotron to be focused down to spot sizes of micron spatial dimensions. They have installed a 4 crystal monochromator prior to the micro-focusing mirrors. The monochromator is designed such that it can move out of the way of the input beam, and allows the same micron sized sample to be illuminated with either white or monochromat… more
Date: June 1998
Creator: MacDowell, A. A.; Lamble, G. M.; Celestre, R. S.; Padmore, H. A.; Chang, C. H. & Patel, J. R.
Item Type: Refine your search to only Article
Partner: UNT Libraries Government Documents Department
open access

Rigorous method for compensation selection and alignment of microlithographic optical systems

Description: The assembly of an optical system requires the correction of aberrations in the entire imaging field by making selected rigid-body motions of the optical elements. We present a rigorous method for determining which adjustment motions, called compensators, to use for alignment. These compensators are found by employing techniques from linear algebra that choose the most independent vectors from a set which are interdependent. The method finds the smallest number of compensators to correct for mi… more
Date: March 25, 1998
Creator: Chapman, H.N. & Sweeney, D.W.
Item Type: Refine your search to only Article
Partner: UNT Libraries Government Documents Department
open access

Novel cost-effective process for the replication of hybrid diffractive/refractive optical elements in silica glass

Description: This CRADA between Martin Marietta Energy Systems, Inc. (Contractor) and GELTECH, Inc. (Participant) has demonstrated the feasibility of producing hybrid diffractive/refractive optics by a replication process which lends itself to high-volume, low-cost production. The program has built unpon unique capabilities of the Contractor and the Participant to achieve this demonstration. The Contractor has extensive experience and unique capabilities in the technology of single point diamong turning for… more
Date: August 1, 1998
Creator: Maxey, L.C.; Nogues, J.L. & Moreshead, B.
Item Type: Refine your search to only Report
Partner: UNT Libraries Government Documents Department
open access

Current 3 {omega} large optic test procedures and data analysis for the quality assurance of National Ignition Facility

Description: A reliable metric is required to describe the damage resistance of large aperture 3{omega} transmissive optics for the National Ignition Facility (NIF) laser. The trend from single site testing to the more statistically valid Gaussian scanning test requires a well modeled experimental procedure, accurate monitoring of the test parameters, and careful interpretation of the resulting volumes of data. The methods described here provide reliable quality assurance data, as well as intrinsic damage c… more
Date: December 22, 1998
Creator: Schwartz, S; Feit, M D; Kozlowski, M R & Mouser, R P
Item Type: Refine your search to only Article
Partner: UNT Libraries Government Documents Department
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