A 10,000 groove/mm multilayer coated grating for EUV spectroscopy
Description:
Ultra-high spectral resolution in the EUV and soft x-ray energy ranges requires the use of very high line density gratings with optimal design resulting in use of a Blazed Multilayer Grating (BMG) structure. Here we demonstrate the production of near-atomically perfect Si blazed substrates with an ultra-high groove density (10,000 l/mm) together with the measured and theoretical performance of an Al/Zr multilayer coating on the grating. A 1st order absolute efficiency of 13percent and 24.6perce…
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Date:
February 7, 2011
Creator:
Voronov, Dmytro; Anderson, Erik; Cambie, Rossana; Cabrini, Stefano; Dhuey, Scott; Goray, Leonid et al.
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