A 10,000 groove/mm multilayer coated grating for EUV spectroscopy

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Ultra-high spectral resolution in the EUV and soft x-ray energy ranges requires the use of very high line density gratings with optimal design resulting in use of a Blazed Multilayer Grating (BMG) structure. Here we demonstrate the production of near-atomically perfect Si blazed substrates with an ultra-high groove density (10,000 l/mm) together with the measured and theoretical performance of an Al/Zr multilayer coating on the grating. A 1st order absolute efficiency of 13percent and 24.6percent was achieved at incidence angles of 11o and 36o respectively. Cross-sectional TEM shows the effect of smoothing caused by the surface mobility of deposited atoms ... continued below

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6320

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Voronov, Dmytro; Anderson, Erik; Cambie, Rossana; Cabrini, Stefano; Dhuey, Scott; Goray, Leonid et al. February 7, 2011.

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Ultra-high spectral resolution in the EUV and soft x-ray energy ranges requires the use of very high line density gratings with optimal design resulting in use of a Blazed Multilayer Grating (BMG) structure. Here we demonstrate the production of near-atomically perfect Si blazed substrates with an ultra-high groove density (10,000 l/mm) together with the measured and theoretical performance of an Al/Zr multilayer coating on the grating. A 1st order absolute efficiency of 13percent and 24.6percent was achieved at incidence angles of 11o and 36o respectively. Cross-sectional TEM shows the effect of smoothing caused by the surface mobility of deposited atoms and we correlate this effect with a reduction in peak diffraction efficiency. This work shows the high performance that can be achieved with BMGs based on small-period anisotropic etched Si substrates, but also the constraints imposed by the surface mobility of deposited species.

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6320

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  • Journal Name: Optics Express; Journal Volume: 19; Journal Issue: 7

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  • Report No.: LBNL-4524E
  • Grant Number: DE-AC02-05CH11231
  • DOI: 10.1364/OE.19.006320 | External Link
  • Office of Scientific & Technical Information Report Number: 1012476
  • Archival Resource Key: ark:/67531/metadc833862

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  • February 7, 2011

Added to The UNT Digital Library

  • May 19, 2016, 3:16 p.m.

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  • July 28, 2016, 12:59 p.m.

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Voronov, Dmytro; Anderson, Erik; Cambie, Rossana; Cabrini, Stefano; Dhuey, Scott; Goray, Leonid et al. A 10,000 groove/mm multilayer coated grating for EUV spectroscopy, article, February 7, 2011; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc833862/: accessed September 23, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.