Ion beam characterization of multi-layer dielectric reflectors
Description:
Energetic ion beams were used to characterize multilayer dielectric reflectors. Alpha-particle beams with beam spot sizes between 10 microns and a few millimeters were scattered from reflectors consisting of 32-layer SiO/sub 2//HfO/sub 2/ and 38-layer MgF/sub 2//ThF/sub 4/. The RBS spectra reveal the nature of the laser damage processes by providing information on diffusion, mixing, and loss of material in the coatings. The particle-induced x-ray emission (PIXE) technique gave complimentary res…
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Date:
January 1, 1985
Creator:
Beery, J. G.; Hollander, M. G.; Maggiore, C. J.; Redondo, A.; Westervelt, R. T. & Taylor, T. N.
Item Type:
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