Cost-Effective Method for Producing Self Supported Palladium Alloy Membranes for Use in Efficient Production of Coal Derived Hydrogen Quarterly Technical Progress Report: September 2003-September 2005
Description:
During the last quarter, new procedures were developed and implemented to improve reliability and repeatability of release characteristics from the temporary substrate (i.e., silicon wafer) and to minimize through-thickness defects in a 6-inch diameter film, 3 microns in thickness. With the new procedures, we have been able to consistently produce essentially stress free films, with zero or minimal defects (less than 5) across a 6-inch diameter area. (It is important to note that for those film…
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Date:
October 28, 2005
Creator:
Lanning, B. & Arps, J.
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