Nitrogen effects on crystallization kinetics of amorphous TiOxNy thin films Page: 4 of 29
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temperature below 1300 0C in 60 seconds, and the temperature can be
determined to within 10 C. The amorphous state of the as-deposited film was
verified by inspection of the diffraction patterns. Diffraction patterns were taken
after crystallization to determine phases present and any preferential grain
orientation.
The annealing temperature varied from 250 0C to 400 0C for 2-3 minutes. The
specimens were heated in 25-degree increments until nucleation was
observed, the temperature was then dropped 50 degrees for growth data.
Growth consistently occurs at temperatures lower than the onset of nucleation,
after nucleation has begun. The samples were then ramped in 10-degree
increments for 5-minute periods until the sample had completely crystallized.
Image analysis of videotape was used to extract the kinetic variables. In each
of the regions observed 2-5 nucleation sites were followed and the area of
each site was determined as a function of time. It was assumed that the
grains were circular, which is approximately true. Kinetic variables were
extracted as well as the fraction of material transformed at 400 C. For the
fraction transformed analysis, the nucleation rate was determined by counting
the number of crystallites visible in a time increment and dividing by the
untransformed area. The fraction of crystallized volume was determined by
image analysis.Hukari, Dannenberg, Stach
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Hukari, Kyle; Dannenberg, Rand & Stach, E.A. Nitrogen effects on crystallization kinetics of amorphous TiOxNy thin films, article, March 30, 2001; Berkeley, California. (https://digital.library.unt.edu/ark:/67531/metadc782309/m1/4/: accessed May 11, 2024), University of North Texas Libraries, UNT Digital Library, https://digital.library.unt.edu; crediting UNT Libraries Government Documents Department.