New standards for ac current and voltage measurements, thin-film multifunction thermal converters (MJTCS), have been fabricated using thin-film and micro-electro-mechanical systems (MEMS) technology. Improved sensitivity and accuracy over single-junction thermoelements and targeted performance will allow new measurement approaches in traditionally troublesome areas such as the low frequency and high current regimes. A review is presented of new microfabrication techniques and packaging methods that have resulted from a collaborative effort at Sandia National Laboratories and the National Institute of Standards and Technology (MHZ).
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Sandia National Labs., Albuquerque, NM, and Livermore, CA (United States)
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Albuquerque, New Mexico
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New standards for ac current and voltage measurements, thin-film multifunction thermal converters (MJTCS), have been fabricated using thin-film and micro-electro-mechanical systems (MEMS) technology. Improved sensitivity and accuracy over single-junction thermoelements and targeted performance will allow new measurement approaches in traditionally troublesome areas such as the low frequency and high current regimes. A review is presented of new microfabrication techniques and packaging methods that have resulted from a collaborative effort at Sandia National Laboratories and the National Institute of Standards and Technology (MHZ).
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Wunsch, Thomas F.; Kinard, Joseph R.; Manginell, Ronald P.; Lipe, Thomas E.; Solomon, Otis M., Jr. & Jungling, Kenneth C.Recent Advances in AC-DC Transfer Measurements Using Thin-Film Thermal Converters,
article,
December 8, 2000;
Albuquerque, New Mexico.
(https://digital.library.unt.edu/ark:/67531/metadc717951/:
accessed May 14, 2024),
University of North Texas Libraries, UNT Digital Library, https://digital.library.unt.edu;
crediting UNT Libraries Government Documents Department.
