Heat Treatment of Cathodic Arc Deposited Amorphous Hard Carbon Films Page: 3 of 26
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LBNL-40108
LSBL-383
UC-426
HEAT TREATMENT OF CATHODIC ARC DEPOSITED
AMORPHOUS HARD CARBON FILMS
Simone Anders1, Joel W. Ager, III1, George M. Pharr2, Ting Y. Tsui3, and I.G. Brown1
1Advanced Light Source
Accelerator & Fusion Research Division
Ernest Orlando Lawrence Berkeley National Laboratory
University of California, Berkeley, California 94720
2Department of Materials Science
Rice University
Houston, Texas 77251-1892
3Advanced Micro Devices
One AMD Place
P.O. Box 3453
Sunnyvale, California 94088-3453
MASTER
DISTRIBUTION OF THIS DOCUMENT IS UNLIMITED
*This work was supported by the Electric Power Research Institute under Award number 8042-03; by the U.S. Army Resear h
Office under Award No. AROl18-95; by the U.S. Department of Energy, Division of Advanced Energy Projects under Contract
No. DE-AC03-76SF00098; by the Division of Materials Sciences, U.S. Department of Energy, under Contract DE-AC05 -
950R222464 with Lockheed Martin Energy Systems; by the SHaRE program under Contract No. DE-AC05-760R00033 with
Oak Ridge Associated Universities; and by the Office of Basic Energy Sciences, Division of Materials Sciences, of the U.S.
Department of Energy under Contract No. DE-AC03-76SF00098.
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Anders, S.; Ager, Joel & Brown, I. G. Heat Treatment of Cathodic Arc Deposited Amorphous Hard Carbon Films, article, February 1, 1997; California. (https://digital.library.unt.edu/ark:/67531/metadc690553/m1/3/: accessed May 12, 2024), University of North Texas Libraries, UNT Digital Library, https://digital.library.unt.edu; crediting UNT Libraries Government Documents Department.