Heat treatment of cathodic arc deposited amorphous hard carbon films

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Amorphous hard carbon films of varying sp{sup 2}/sp{sup 3} fractions have been deposited on Si using filtered cathodic are deposition with pulsed biasing. The films were heat treated in air up to 550 C. Raman investigation and nanoindentation were performed to study the modification of the films caused by the heat treatment. It was found that films containing a high sp{sup 3} fraction sustain their hardness for temperatures at least up to 400 C, their structure for temperatures up to 500 C, and show a low thickness loss during heat treatment. Films containing at low sp{sup 3} fraction graphitize during ... continued below

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22 pages

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Anders, S.; Ager, J.W. III & Brown, I.G. February 1, 1997.

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Description

Amorphous hard carbon films of varying sp{sup 2}/sp{sup 3} fractions have been deposited on Si using filtered cathodic are deposition with pulsed biasing. The films were heat treated in air up to 550 C. Raman investigation and nanoindentation were performed to study the modification of the films caused by the heat treatment. It was found that films containing a high sp{sup 3} fraction sustain their hardness for temperatures at least up to 400 C, their structure for temperatures up to 500 C, and show a low thickness loss during heat treatment. Films containing at low sp{sup 3} fraction graphitize during the heat treatment, show changes in structure and hardness, and a considerable thickness loss.

Physical Description

22 pages

Notes

OSTI as DE00503468

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  • 24. international conference on metallurgical coatings and thin films (ICMCTF-24) and exhibition, San Diego, CA (US), 04/21/1997--04/25/1997; Other Information: Supercedes report DE97007324; PBD: Feb 1997

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  • Other: DE97007324
  • Report No.: LBNL--40108
  • Report No.: LSBL--383
  • Report No.: CONF-970488--3
  • Report No.: LBNL/ALS--739
  • Grant Number: AC03-76SF00098
  • Grant Number: AC05-96OR22464
  • Grant Number: AC05-76OR00033
  • Office of Scientific & Technical Information Report Number: 503468
  • Archival Resource Key: ark:/67531/metadc690553

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  • February 1, 1997

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  • Aug. 14, 2015, 8:43 a.m.

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  • Oct. 3, 2017, 6:59 p.m.

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Anders, S.; Ager, J.W. III & Brown, I.G. Heat treatment of cathodic arc deposited amorphous hard carbon films, article, February 1, 1997; California. (digital.library.unt.edu/ark:/67531/metadc690553/: accessed September 23, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.