Heat Treatment of Cathodic Arc Deposited Amorphous Hard Carbon Films
Description:
Amorphous hard carbon films of varying sp{sup 2}/sp{sup 3} fractions have been deposited on Si using filtered cathodic are deposition with pulsed biasing. The films were heat treated in air up to 550 C. Raman investigation and nanoindentation were performed to study the modification of the films caused by the heat treatment. It was found that films containing a high sp{sup 3} fraction sustain their hardness for temperatures at least up to 400 C, their structure for temperatures up to 500 C, and…
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Date:
February 1, 1997
Creator:
Anders, S.; Ager, Joel & Brown, I. G.
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UNT Libraries Government Documents Department