Low electron beam energy CIVA analysis of passivated ICs
Description:
Low Energy Charge-Induced Voltage Alteration (LECIVA) is a new scanning electron microscopy technique developed to localize open conductors in passivated ICs. LECIVA takes advantage of recent experimental work showing that the dielectric surface equilibrium voltage has an electron flux density dependence at low electron beam energies ({le}1.0 keV). The equilibrium voltage changes from positive to negative as the electron flux density is increased. Like Charge-Induced Voltage Alteration (CIVA), …
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Date:
August 1, 1994
Creator:
Cole, E. I., Jr.; Soden, J. M.; Dodd, B. A. & Henderson, C. L.
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Partner:
UNT Libraries Government Documents Department