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Formation of aluminum films on silicon by ion beam deposition: A comparison with ionized cluster beam deposition

Description: The direct ion beam deposition (IBD) technique has been used to study the formation of oriented aluminum films on single crystal silicon substrates. In the IBD process, thin film growth is accomplished by decelerating a magnetically-analyzed ion beam to low energies (10--200 eV) for direct deposition onto the substrate under UHV conditions. The energy of the incident ions can be selected to provide the desired growth conditions, and the mass analysis ensures good beam purity. The aluminum on si… more
Date: January 1, 1990
Creator: Zuhr, R.A.; Haynes, T.E.; Galloway, M.D. (Oak Ridge National Lab., TN (USA)); Tanaka, S.; Yamada, A. & Yamada, I. (Kyoto Univ. (Japan). Ion Beam Engineering Lab.)
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Partner: UNT Libraries Government Documents Department
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Structure and Electrochemical Properties of LiMn2O4 Thin Films

Description: The structure and electrochemical properties of LiMn{sub 2}O{sub 4} films depend upon the deposition and annealing conditions. Films which were deposited by rf magnetron sputtering of LiMn{sub 2}O{sub 4} in Ar + N{sub 2} gas mixtures and annealed in O{sub 2} at temperatures between 400 to 1000{degrees}C had the cubic spinel structure with an a-axis length that increased linearly from 8.13 to 8.25 {Angstrom} with increasing anneal temperature. Thin-film lithium cells with cathodes of different a… more
Date: November 1, 1998
Creator: Bates, J.B.; Ueda, A. & Zuhr, R.A.
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Partner: UNT Libraries Government Documents Department
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3d-Metal Doped into LiMn2O4 Thin Films

Description: 3d-metal (Me) doped LiMn{sub 2}O{sub 4} thin films were deposited by rf magnetron sputtering of Li[Mn{sub 1.9}Me{sub 0.1}]O{sub 4} targets in Ar + N{sub 2} and Ar + O{sub 2} gas mixtures and annealed at 750{degrees}C in O{sub 2} for 1 h. From XRD measurements, the structure of the Me-doped thin film was dependent upon the element and the deposition conditions. The doping level of Me/Mn of cubic phase was less than 0.1 by EDX measurements. The Ti-LiMn{sub 2}O{sub 4} films exhibited a capacity cl… more
Date: November 1, 1998
Creator: Bates, J.B.; Ueda, A. & Zuhr, R.A.
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Partner: UNT Libraries Government Documents Department
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Ionic conductivities of lithium phosphorus oxynitride glasses, polycrystals, and thin films

Description: Various lithium phosphorus oxynitrides have been prepared in the form of glasses, polycrystals, and thin films. The structures of these compounds were investigated by X-ray and neutron diffraction, X-ray photoelectron spectroscopy (XPS), and high-performance liquid chromatography (HPLC). The ac impedance measurements indicate a significant improvement of ionic conductivity as the result of incorporation of nitrogen into the structure. In the case of polycrystalline Li{sub 2.88}PO{sub 3.73}N{sub… more
Date: November 1, 1994
Creator: Wang, B.; Bates, J.B.; Chakoumakos, B.C.; Sales, B.C.; Kwak, B.S.; Zuhr, R.A. et al.
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Partner: UNT Libraries Government Documents Department
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Carbon implanted in optical grade fused silica: annealing effects in reducing and oxidizing atmospheres

Description: Carbon is implanted into fused silica with doses of 1, 3, 6, 10X10{sup 16} ions/cm{sup 2}. Infrared spectroscopy identified the formation of CO and CO{sub 2} molecules in the implanted glasses. Relations among concentrations of carbon dioxide, carbon monoxide, and carbon doses are established by the infrared measurements. Annealing under different atmospheres have dramatic effects on CO and CO{sub 2} concentrations.
Date: January 1, 1997
Creator: Tsung, Y.S.; Mu, R.; Ueda, A.; Henderson, D.O.; Wang, P.W.; White, C.W. et al.
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Partner: UNT Libraries Government Documents Department
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Vibrational and electronic transition in InAs quantum dots formed by sequential implantation of In and As in a-SiO[sub 2]

Description: Optical, structural, and thermodynamic properties of materials can be changed by reducing their dimensions. We sequentially implanted In and As into fused silica windows in order to investigate formation and properties of InAs nano-particles. UV/VIS/NIR, FTIR in mid-IR, and far-IR spectroscopy were used to study change in electronic transitions and in vibrational modes (phonons) of the nano-particles InAs. The phonons can be confined to the surface of nano-particles and have frequencies falling… more
Date: January 1, 1996
Creator: Ueda, A.; Henderson, D.O.; Mu, R.; Tung, Y.S.; Hall, C.; Zhu, J.G. et al.
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Partner: UNT Libraries Government Documents Department
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Optical and magnetic properties of silica implanted with N{sup +} and Fe{sup +}

Description: Silica platelets (Corning 7940) were implanted sequentially with N{sup +} at 52 keV to different doses ranging from 0 to 1.2{times}10{sup 17} ions cm{sup {minus}2} and then with Fe{sup +} at 160 keV to a dose of 6{times}l0{sup 16} ions cm{sup {minus}2}. The optical absorption decreased with increasing N{sup +} dose at photon energies ranging from 1.4 to 6.5 eV. The relative intensity, S(0{degrees}), of the ferromagnetic resonance absorption and its resonance field, H{sub s}(0{degrees}), at {the… more
Date: December 1, 1995
Creator: Isobe, T.; Weeks, R.A. & Zuhr, R.A.
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Partner: UNT Libraries Government Documents Department
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Sputter deposition and characterization of lithium cobalt oxide thin films and their applications in thin-film rechargeable lithium batteries

Description: Li Co oxide thin films were deposited by rf magnetron sputtering of a LiCoO{sub 2} target in a 3:1 Ar/O{sub 2} mixture gas. From proton-induced gamma-ray emission analysis and Rutherford backscattering spectrometry, the average composition of these films was determined to be Li{sub 1.15}CoO{sub 2.16}. X-ray powder diffraction patterns of films annealed in air at 500-700 C were consistent with regular rhombohedral structure of crystalline LiCoO{sub 2}. Discharge curves of thin film lithium cells… more
Date: January 1, 1996
Creator: Wang, B.; Bates, J.B.; Luck, C.F.; Sales, B.C.; Zuhr, R.A. & Robertson, J.D.
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Partner: UNT Libraries Government Documents Department
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Mesoscale Engineering of Nanocomposite Nonlinear Optical Materials

Description: Complex nonlinear optical materials comprising elemental, compound or alloy quantum dots embedded in appropriate dielectric or semiconducting hosts may be suitable for deployment in photonic devices. Ion implantation, ion exchange followed by ion implantation, and pulsed laser deposition have ail been used to synthesize these materials. However, the correlation between the parameters of energetic-beam synthesis and the nonlinear optical properties is still very rudimentary when one starts to as… more
Date: November 1, 1999
Creator: Afonso, C.N.; Feldman, L.C.; Gonella, F.; Haglund, R.F.; Luepke, G.; Magruder, R.H. et al.
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Partner: UNT Libraries Government Documents Department
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Laser induced diffusion of ion-implanted bismuth in fused silica

Description: The near surface regions of optical grade fused silica discs (Spectrosil A) were modified by implantation with bismuth ions at 160 and 320 keV and at room temperature. The glasses implanted with a nominal dose of 6 {times} l0{sup 16} Bi{sup 2+} ions/cm{sup 2} were subsequently annealed with a 5 eV KrF pulsed excimer laser and by a furnace in oxygen atmosphere. Rutherford backscattering and optical absorption were measured before and after the anneals. Backscattering profiles after laser anneal … more
Date: December 31, 1994
Creator: Park, S.Y.; Weeks, R.A. & Zuhr, R.A.
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Partner: UNT Libraries Government Documents Department
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