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Measurment of Depositing and Bombarding Species Involved in the Plasma Production of Amorphous Silicon and Silicon/Germanium Solar Cells: Annual Technical Report, 1 June 2002 - 31 May 2005

Description: The objective of this study is to measure the molecular species that lead to the growth of hydrogenated amorphous silicon (a-Si:H) and microcrystalline silicon (..mu..c-Si) photovoltaic (PV) devices from RF discharges. Neutral radicals produce most of the film growth during this PV-device production, and, by implication, radicals primarily determine the device structure and electrical characteristics. The most important feature of the present experiment is thus the measurement of neutral-radica… more
Date: June 1, 2006
Creator: Gallagher, A.; Rozsa, K.; Horvath, P. & Kujundcik, D.
Item Type: Refine your search to only Report
Partner: UNT Libraries Government Documents Department
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Metal Plasmas for the Fabrication of Nanostructures

Description: A review is provided covering metal plasma production, theenergetic condensation of metal plasmas, and the formation ofnanostructures using such plasmas. Plasma production techniques includepulsed laser ablation, filtered cathodic arcs, and various forms ofionized physical vapor deposition, namely magnetron sputtering withionization of sputtered atoms in radio frequency discharges,self-sputtering, and high power impulse magnetron sputtering. Thediscussion of energetic condensation focuses on th… more
Date: September 21, 2006
Creator: Anders, Andre
Item Type: Refine your search to only Article
Partner: UNT Libraries Government Documents Department
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