Metal plasmas for the fabrication of nanostructures

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A review is provided covering metal plasma production, theenergetic condensation of metal plasmas, and the formation ofnanostructures using such plasmas. Plasma production techniques includepulsed laser ablation, filtered cathodic arcs, and various forms ofionized physical vapor deposition, namely magnetron sputtering withionization of sputtered atoms in radio frequency discharges,self-sputtering, and high power impulse magnetron sputtering. Thediscussion of energetic condensation focuses on the control of kineticenergy by biasing and also includes considerations of the potentialenergy and the processes occurring at subplantation and implantation. Inthe final section on nanostructures, two different approaches arediscussed. In the top-down approach, the primary nanostructures arelithographically produced and metal ... continued below

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Anders, Andre September 21, 2006.

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Description

A review is provided covering metal plasma production, theenergetic condensation of metal plasmas, and the formation ofnanostructures using such plasmas. Plasma production techniques includepulsed laser ablation, filtered cathodic arcs, and various forms ofionized physical vapor deposition, namely magnetron sputtering withionization of sputtered atoms in radio frequency discharges,self-sputtering, and high power impulse magnetron sputtering. Thediscussion of energetic condensation focuses on the control of kineticenergy by biasing and also includes considerations of the potentialenergy and the processes occurring at subplantation and implantation. Inthe final section on nanostructures, two different approaches arediscussed. In the top-down approach, the primary nanostructures arelithographically produced and metal plasma is used to coat or filltrenches and vias. Additionally, multilayers with nanosize periods(nanolaminates) can be produced. In the bottom-up approach, thermodynamicforces are used to fabricate nanocomposites and nanoporous materials bydecomposition and dealloying.

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  • Journal Name: Journal of Physics D: Applied Physics; Journal Volume: 40; Related Information: Journal Publication Date: 2007

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  • Report No.: LBNL--61665
  • Grant Number: DE-AC02-05CH11231
  • Office of Scientific & Technical Information Report Number: 918663
  • Archival Resource Key: ark:/67531/metadc877061

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  • September 21, 2006

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  • Sept. 22, 2016, 2:13 a.m.

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  • Sept. 29, 2016, 3:11 p.m.

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Anders, Andre. Metal plasmas for the fabrication of nanostructures, article, September 21, 2006; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc877061/: accessed August 23, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.