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in subjects: "Plasma Production"  
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A debris free, electron beam driven, lithography source at 130 [angstrom]

Description: Los Alamos and Grumman are cooperatively investigating a debris free source for EUV lithography. This source utilizes the predicted anomalous energy loss of a short pulse electron beam in a preformed plasma to heat and ionize the ions to a charge state where efficient radiation at 130[angstrom] occurs. Accelerators developed for the free electron laser program at Los Alamos are used as the electron bunch source. These accelerators use a laser driven photocathode to produce 15 psec electron bunc… more
Date: January 1, 1994
Creator: Fulton, R. D.; Abdallah, J.; Goldstein, J. C.; Jones, M. E.; Kilcrease, D. P.; Kinross-Wright, J. M. et al.
Item Type: Refine your search to only Article
Partner: UNT Libraries Government Documents Department
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New plasma source of hydrides for epitaxial growth. Final subcontract report, 15 April 1991--3 September 1993

Description: This report describes a novel plasma-activated selenium source that was developed during the course of this subcontract and which is significantly different than any other heretofore reported in the scientific literature. It involves microwave excited, magnetically confined plasma sources that are intended to operate under electron cyclotron resonance (ECR) conditions at 2.455 GHz. This source is designed to excite and dissociate the molecular vapor evaporating or subliming from a heated solid … more
Date: May 1, 1994
Creator: Stanbery, B. J.
Item Type: Refine your search to only Report
Partner: UNT Libraries Government Documents Department
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Cu deposition using a permanent magnet electron cyclotron resonance microwave plasma source

Description: An electron cyclotron resonance (ECR) plasma has been used in conjunction with a solid metal sputter target for Cu deposition over 200-mm diameters. The goal is to develop a deposition process suitable for filling submicron, high aspect ratio features used for ultralarge scale integration. The system uses a permanent magnet for creation of the magnetic field necessary for ECR and is significantly more compact than systems equipped with electromagnets. A custom launcher design allows remote micr… more
Date: September 1, 1994
Creator: Berry, L. A.; Gorbatkin, S. M. & Rhoades, R. L.
Item Type: Refine your search to only Report
Partner: UNT Libraries Government Documents Department
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X-ray imaging of uniform large scale-length plasmas created from gas-filled targets on Nova

Description: We report on the production and characterization of large scale-length plasmas created by illuminating gas-filled thin-walled balloon-like targets using the Nova laser. The targets consisted of a 4--5000 {angstrom} skin surrounding 1 atm of neopentane which when ionized becomes a plasma with 10{sup 21} electrons/cm{sup 3}. Results are presented from x-ray imaging used to evaluate the uniformity of the plasma. The most uniform plasmas were produced by illuminating the target with large convergin… more
Date: May 1, 1994
Creator: Kalantar, D. H.; MacGowan, B. J. & Bernat, T. P.
Item Type: Refine your search to only Article
Partner: UNT Libraries Government Documents Department
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Plasma production for the 50 MeV plasma lens experiment at LBL

Description: The Center for Beam Physics at LBL has constructed a Beam Test Facility (BTF) housing a 50 MeV electron beam transport line, which uses the linac injector from the Advanced Light Source, and a terawatt Ti:Al{sub 2}O{sub 3} laser system. The linac operates at 50 MeV and generates 15 ps long electron bunches containing a charge of up to 2 nC. The measured unnormalized beam emittance is 0.33 mm-mrad. These parameters allow for a comprehensive study of focusing of relativistic electron beams with p… more
Date: June 1, 1994
Creator: Leemans, W.; van der Geer, B.; de Loos, M.; Conde, M.; Govil, R. & Chattopadhyay, S.
Item Type: Refine your search to only Article
Partner: UNT Libraries Government Documents Department
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Radio frequency current drive for small aspect ratio tori

Description: Non-inductive current drive (CD) is required during plasma initiation and for current sustainment in NSTX. The physics of high harmonic fast waves (HHFW) and the design of an antenna system for NSTX are studied. It is found that the theoretical current drive efficiency for HHFW can be high, and a general survey of parameters gives a good target for the antenna design. The primary issue for HHFW during plasma initiation is loading since the CD efficiency is very high for low density plasmas. For… more
Date: December 31, 1994
Creator: Carter, M. D.; Jaeger, E. F.; Batchelor, D. B.; Strickler, D. J. & Majeski, R.
Item Type: Refine your search to only Article
Partner: UNT Libraries Government Documents Department
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Inertial confinement fusion quarterly report, July--September 1994. Volume 4, Number 4

Description: The ICF Quarterly continues with six articles in this issue describing recent developments in the Inertial Confinement Fusion (ICF) Program at Lawrence Livermore National Laboratory. The topics include plasma characterization, production of millimeter scale-length plasmas for studying laser-plasma instabilities, hohlraum physics, three-dimensional hydrodynamic modeling, crystal growth, and laser-beam smoothing.
Date: September 1, 1994
Creator: Honea, E.
Item Type: Refine your search to only Report
Partner: UNT Libraries Government Documents Department
open access

A microwave plasma cleaning apparatus

Description: In a microwave electron cyclotron resonance plasma source, reactive plasmas of oxygen and its mixtures of argon have been used for evaluating plasma cleaning technologies. Small aluminum samples (0.95 x 1.9 cm) were coated with thin films ({le} 20 {micro}m in thickness) of Shell Vitrea oil and cleaned with reactive plasmas. The discharge parameters, such as gas pressure, magnetic field, substrate biasing, and microwave power, were varied to change cleaning conditions. A mass spectroscopy (or re… more
Date: December 31, 1994
Creator: Tsai, C. C.; Nelson, W. D.; Schechter, D. E.; Thompson, L. M. & Glover, A. L.
Item Type: Refine your search to only Report
Partner: UNT Libraries Government Documents Department
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