Actinic EUV mask inspection beyond 0.25 NA
Description:
Operating at EUV wavelengths, the SEMATECH Berkeley Actinic Inspection Tool (AIT) is a zoneplate microscope that provides high quality aerial image measurements in routine operations for SEMATECH member companies. We have upgraded the optical performance of the AIT to provide multiple image magnifications, and several inspection NA values up to 0.35 NA equivalent (0.0875 mask-side). We report on the improved imaging capabilities including resolution below 100-nm on the mask side (25 nm, 4x wafe…
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Date:
August 6, 2008
Creator:
Goldberg, Kenneth A.; Mochi, Iacopo; Anderson, Erik H.; Rekawa, Seno B.; Kemp, Charles D.; Huh, S. et al.
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UNT Libraries Government Documents Department