Calibration of an interfacial force microscope for MEMS metrology : FY08-09 activities.
Description:
Progress in MEMS fabrication has enabled a wide variety of force and displacement sensing devices to be constructed. One device under intense development at Sandia is a passive shock switch, described elsewhere (Mitchell 2008). A goal of all MEMS devices, including the shock switch, is to achieve a high degree of reliability. This, in turn, requires systematic methods for validating device performance during each iteration of design. Once a design is finalized, suitable tools are needed to prov…
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Date:
October 1, 2009
Creator:
Houston, Jack E.; Baker, Michael Sean; Crowson, Douglas A.; Mitchell, John Anthony & Moore, Nathan W.
Item Type:
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Partner:
UNT Libraries Government Documents Department