Calibration of an interfacial force microscope for MEMS metrology : FY08-09 activities.

One of 92 reports in the series: Fiscal Year 2008 available on this site.

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Description

Progress in MEMS fabrication has enabled a wide variety of force and displacement sensing devices to be constructed. One device under intense development at Sandia is a passive shock switch, described elsewhere (Mitchell 2008). A goal of all MEMS devices, including the shock switch, is to achieve a high degree of reliability. This, in turn, requires systematic methods for validating device performance during each iteration of design. Once a design is finalized, suitable tools are needed to provide quality assurance for manufactured devices. To ensure device performance, measurements on these devices must be traceable to NIST standards. In addition, accurate ... continued below

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35 p.

Creation Information

Houston, Jack E.; Baker, Michael Sean; Crowson, Douglas A.; Mitchell, John Anthony & Moore, Nathan W. October 1, 2009.

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  • Main Title: Calibration of an interfacial force microscope for MEMS metrology : FY08-09 activities.
  • Series Title: Fiscal Year 2008
  • Series Title: Fiscal Year 2009

Description

Progress in MEMS fabrication has enabled a wide variety of force and displacement sensing devices to be constructed. One device under intense development at Sandia is a passive shock switch, described elsewhere (Mitchell 2008). A goal of all MEMS devices, including the shock switch, is to achieve a high degree of reliability. This, in turn, requires systematic methods for validating device performance during each iteration of design. Once a design is finalized, suitable tools are needed to provide quality assurance for manufactured devices. To ensure device performance, measurements on these devices must be traceable to NIST standards. In addition, accurate metrology of MEMS components is needed to validate mechanical models that are used to design devices to accelerate development and meet emerging needs. Progress towards a NIST-traceable calibration method is described for a next-generation, 2D Interfacial Force Microscope (IFM) for applications in MEMS metrology and qualification. Discussed are the results of screening several suitable calibration methods and the known sources of uncertainty in each method.

Physical Description

35 p.

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  • Report No.: SAND2009-6799
  • Grant Number: AC04-94AL85000
  • DOI: 10.2172/1001011 | External Link
  • Office of Scientific & Technical Information Report Number: 1001011
  • Archival Resource Key: ark:/67531/metadc832847

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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  • October 1, 2009

Added to The UNT Digital Library

  • May 19, 2016, 3:16 p.m.

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  • Dec. 9, 2016, 3:27 p.m.

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Houston, Jack E.; Baker, Michael Sean; Crowson, Douglas A.; Mitchell, John Anthony & Moore, Nathan W. Calibration of an interfacial force microscope for MEMS metrology : FY08-09 activities., report, October 1, 2009; United States. (digital.library.unt.edu/ark:/67531/metadc832847/: accessed November 17, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.