Optical interference microscopy plays an important role in the measurement of targets for inertial confinement fusion experiments. We describe how these techniques are applied to the measurement of thickness and refractive index of multilayer films on both flat substrates and microsphere targets. We also discuss procedures for manipulating and examining microsphere targets to measure defects and wall thickness variations anywhere on the target. Finally, we describe the use of optical interferometry to measure the individual components and final assembled structure of double-shell targets. The accuracy of these measurements is from 0.03 to 0.5 ..mu..m, depending on the specific application.
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Optical interference microscopy plays an important role in the measurement of targets for inertial confinement fusion experiments. We describe how these techniques are applied to the measurement of thickness and refractive index of multilayer films on both flat substrates and microsphere targets. We also discuss procedures for manipulating and examining microsphere targets to measure defects and wall thickness variations anywhere on the target. Finally, we describe the use of optical interferometry to measure the individual components and final assembled structure of double-shell targets. The accuracy of these measurements is from 0.03 to 0.5 ..mu..m, depending on the specific application.
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Weinstein, B.W.; Weir, J.T. & Willenborg, D.L.Interferometric measurements of multilayer and double shell inertial fusion targets,
article,
August 26, 1980;
Livermore, California.
(https://digital.library.unt.edu/ark:/67531/metadc1061521/:
accessed July 16, 2024),
University of North Texas Libraries, UNT Digital Library, https://digital.library.unt.edu;
crediting UNT Libraries Government Documents Department.