Development of Silicon Nanowire Field Effect Transistors Page: V
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2.4.2. Stages of Growth ........................ ................... 13
2.5. Factors affecting the Morphology and Composition ......... ............. 14
2.5.1. Temperature ........................ .................. ...14
2.5.2. Gas Flow Rate ........................................... ...15
2.5.3. Thickness of Au Catalyst ............. .. ........................ 15
2.5.4. Gas Mixture Composition ............ ........ .................. 15
2.6. Transmission Electron Microscopy Characterization ......................... 17
2.7. X-ray Diffraction Characterization ........................................... 18
2.8. Conclusion ................................................................ 19
CHAPTER 3. DOPING OF SILICON NANOWIRES WITH ANTIMONY........... 20
3.1. Introduction ................................................................. 20
3.2. Synthesis of Sb-doped Si Nanowires ..................................... .....22
3.2.1. Doping During Growth ......................................... 22
3.2.2. Doping After Growth (Post-Growth) ..................................... 22
3.2.3. D iffusion ..................................... ................... ......... 23
3.2.4. Diffusion of Sb in Si ........................................... 25
3.3. Conclusion ................................................................... 26
CHAPTER 4. ELECTRICAL CHARACTERIZATION OF SILICON NANOWIRES. 27
4.1. Introduction ................................................................. 27
4.2. Design of FET ....................... ...................... 27
4.3. Transport Measurements of Undoped Si Nanowires ......................... 29
4.4. Transport Measurements of Sb Doped Si Nanowires ........................... 30
4.5. Determination of Intrinsic Parameters for Undoped and Sb-doped Si Nanowires 31
4.6. Conclusion........... ................................................32
CHAPTER 5. OPTICAL CHARACTERIZATION OF SILICON NANOWIRES..... 34
5.1. Photoluminiscence Measurements on Si Nanowires .......................... 34
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Nukala, Prathyusha. Development of Silicon Nanowire Field Effect Transistors, thesis, December 2011; Denton, Texas. (https://digital.library.unt.edu/ark:/67531/metadc103364/m1/6/: accessed July 17, 2024), University of North Texas Libraries, UNT Digital Library, https://digital.library.unt.edu; .