Cost-Effective Method for Producing Self Supported Palladium Alloy Membranes for Use in Efficient Production of Coal Derived Hydrogen Quarterly Technical Progress Report: September 2003-January 2006
Description:
In the past quarter, significant progress has been made in optimize the deposition and release characteristics of ultrathin (less than 4 micron) membranes from rigid silicon substrates. Specifically, we have conducted a series of statistically designed experiments to examine the effects of plasma cleaning and compliant layer deposition conditions on the stress, release and pinhole density of membranes deposited on 4 inch and 6 inch round substrates. With this information we have progressed to t…
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Date:
January 1, 2006
Creator:
Arps, J.
Partner:
UNT Libraries Government Documents Department