Highly Conductive Textured Molybdenum Doped Indium Oxide Thin Films
Description:
We report on the pulsed laser deposition (PLD) of Mo-doped indium oxide (IMO) films with mobilities of up to 125 cm2/Vsec. Films have been grown from targets with 1-4 wt.% molybdenum. The optimum electrical and optical properties were obtained with the 2% target and yielded a maximum conductivity of 3717 S/cm with mobilities of 99 cm2/V-sec on (100) yttria stabilized zirconia (YSZ) single crystal substrates. Films also exhibit greater than 90% transparency in the visible range. Compared to comm…
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Date:
May 1, 2003
Creator:
Warmsingh, C.; Yoshida, Y.; Readey, D.; Perkins, J.; Parilla, P.; Teplin, C. et al.
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UNT Libraries Government Documents Department