Optimization of Conductivity and Transparency in Amorphous In-Zn-O Transparent Conductors: Preprint
Description:
Amorphous mixed metal oxide TCOs are of increasing interest due to the excellent opto-electronic properties and smoothness (RRMS < 0.5 nm) obtained for sputtered films deposited at less than 100 ..deg..C. Here, we have investigated the combined materials phase space of oxygen stoichiometry and metals composition (In:Zn ratio) and made two key discoveries.
Date:
May 1, 2008
Creator:
Perkins, J.; Berry, J.; van Hest, M.; Alleman, J.; Dabney, M.; Gedvilas, L. et al.
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