Conventional magnet storage rings for x-ray lithography
Description:
A first pass at the design of a conventional magnet storage ring for x-ray lithogrphy is presented. Electron beam size and power specifications are given, followed by a first pass at a lattice - a 4-fold symmetric, gradient FODO cell lattice using B = 1.6 Tesla C-magnets. (LEW)
Date:
October 1, 1986
Creator:
Bassetti, M.; Batchelor, K.; Galayda, J.; Halama, H.; Heese, R.; Hsieh, H. et al.
Item Type:
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Partner:
UNT Libraries Government Documents Department