Development of damage resistant sputtered oxide optical coatings for use at 248 NM
Description:
This report summarizes the results of a six-month effort to develop damage-resistant Kr*F laser mirrors by using and refining reactive sputter deposition techniques for the fabricaton of multilayer oxide optical coatings. Mirror performance goals included a reflectivity of 99% at 248 nm and a laser damage threshold of 5 J/cm/sup 2/ for 20 ns pulses. Oxide multilayer coating combinations selected for development were SiO/sub 2//Al/sub 2/O/sub 3/, SiO/sub 2//HfO/sub 2/ and SiO/sub 2//Y/sub 2/O/su…
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Date:
October 1, 1981
Creator:
Pawlewicz, W. T.; Martin, P. M.; Hays, D. D. & Mann, I. B.
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Partner:
UNT Libraries Government Documents Department