Chlorine Free Technology for Solar-Grade Silicon Manufacturing: Preprint
Description:
Due to the development of the solar energy industry, a significant increase of polysilicon feedstock (PSF) production will be required in near future. The creation of special technology of solar grade polysilicon feedstock production is an important problem. Today, semiconductor-grade polysilicon is mainly manufactured using the trichlorosilane (SiHCl3) distillation and reduction. The feed-stock for trichlorosilane is metallurgical-grade silicon, the product of reduction of natural quartzite (s…
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Date:
August 1, 2004
Creator:
Strebkov, D. S.; Pinov, A. P.; Zadde, V. V.; Lebedev, E. N.; Belov, E. P.; Efimov, N. K. et al.
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