Pump down rate for SRF cavities
Description:
This note is about calculations aimed at quantifying adequate pumping speeds of evacuation of normally humid clean-room air from typical Superconducting Radiofrequency (SRF) cavities. The subject is of high relevance to the semiconductor industry, where the yield of VLSI (Very Large Scale Integration) chip production is affected by micron size particles which may cause fatal defects to their micron and sub-micron features. The recent availability of particle counters capable of operating in vac…
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Date:
February 1, 1992
Creator:
Kuchnir, M. (Fermi National Accelerator Lab., Batavia, IL (United States)) & Knobloch, J. (Cornell Univ., Ithaca, NY (United States). Lab. of Nuclear Studies)
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