Time Resolved Reflectivity Measurements in Pb-Implanted Srtio/Sub 3/
Description:
Time resolved optical reflectivity (TRR) is a simple and elegant technique for dynamically monitoring the interface motion that occurs during crystallization of thin films and amorphous layers on crystalline substrates. This in situ technique has enabled measurements of the solid-phase epitaxial regrowth rate of amorphous silicon layers produced by ion implantation to be extended by over five orders of magnitude to rates in excess of 10/sup 6/ /angstrom//s. TRR is also well suited to measuremen…
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Date:
June 1, 1989
Creator:
McCallum, J. C.; Rankin, J.; White, C. W. & Boatner, L. A.
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Partner:
UNT Libraries Government Documents Department