Deposition and properties of novel nitride superlattice coatings
Description:
We have carried out detailed studies of the processing, structure, and properties of certain polycrystalline superlattice coatings, including TiN/NbN, TiN/VN, TiN/Ni, and TiN/NiCr, which were produced using an opposed, dual-cathode, high-rate, reactive, unbalanced-magnetron sputtering system. The coatings exhibited hardness values as high as 5200 kgf/mm[sup 2] for TiN/NbN, 5100 for TiN/VN, 3500 for TiN/Ni, and 3200 for TiN/NiCr. These hardness values are all twice higher than their correspondin…
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Date:
April 1, 1993
Creator:
Barnett, S. A.; Sproul, W. D. & Wong, M. S.
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Partner:
UNT Libraries Government Documents Department