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Development of a Laboratory Extreme-Ultraviolet Lithography Tool

Description: The development of a laboratory EUV lithography tool based on a laser plasma source, a 10x Schwarzchild camera, and a magnetically levitated wafer stage is presented. Interferometric measurements of the camera aberrations are incorporated into physical-optics simulations to estimate the EUV imaging performance of the camera. Experimental results demonstrate the successful matching of five multilayer reflecting surfaces, coated to specification for a wide range of figure and incidence angle requ… more
Date: April 1, 1994
Creator: Tichenor, D. A.; Kubiak, G. D.; Malinowski, M. E.; Stulen, R. H.; Haney, S. J.; Berger, K. W. et al.
Item Type: Refine your search to only Report
Partner: UNT Libraries Government Documents Department
open access

Limitation on Pre-pulse Level for Cone-Guided Fast-Ignition ICF

Description: The viability of fast-ignition (FI) inertial confinement fusion hinges on the efficient transfer of laser energy to the compressed fuel via multi-MeV electrons. Pre-formed plasma due to laser pre-pulse strongly influences ultra-intense laser plasma interactions and hot electron generation in the hollow cone of an FI target. We induced a prepulse and consequent preplasma in copper cone targets and measured the energy deposition zone of the main pulse by imaging the emitted K{sub {alpha}} radiati… more
Date: September 1, 2009
Creator: MacPhee, A. G.; Akli, K. U.; Beg, F. N.; Chen, C. D.; Chen, H.; Divol, L. et al.
Item Type: Refine your search to only Article
Partner: UNT Libraries Government Documents Department
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