Towards sub-10 nm resolution zone plates using the overlaynanofabrication processes
Description:
Soft x-ray zone plate microscopy has proven to be a valuable imaging technique for nanoscale studies. It complements nano-analytic techniques such as electron and scanning probe microscopies. One of its key features is high spatial resolution. We developed an overlay nanofabrication process which allows zone plates of sub-20 nm zone widths to be fabricated. Zone plates of 15 nm outer zones were successfully realized using this process, and sub-15 nm resolution was achieved with these zone plate…
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Date:
January 23, 2008
Creator:
Chao, Weilun; Anderson, Erik H.; Fischer, Peter & Kim, Dong-Hyun
Partner:
UNT Libraries Government Documents Department