Stability of modulation transfer function calibration of surface profilometers using binary pseudo-random gratings and arrays with nonideal groove shapes
Description:
The major problem of measurement of a power spectral density (PSD) distribution of surface heights with surface profilometers arises due to the unknown Modulation Transfer Function (MTF) of the instruments, which tends to distort the PSD at higher spatial frequencies. The special mathematical properties of binary pseudo-random patterns make them an ideal basis for developing MTF calibration test surfaces. Two-dimensional binary pseudo-random arrays (BPRAs) have been fabricated and used for the …
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Date:
March 31, 2010
Creator:
Barber, Samuel K.; Anderson, Erik H.; Cambie, Rossana; Marchesini, Stefano; McKinney, Wayne R.; Takacs, Peter Z. et al.
Partner:
UNT Libraries Government Documents Department