Supercritical Silylation and Stability of Silyl Groups
Description:
Methylsilsesquioxane (MSQ) and organosilicate glass (OSG) are the materials under this study because they exhibit the dielectric constant values necessary for future IC technology requirements. Obtaining a low-k dielectric value is critical for the IC industry in order to cope time delay and cross talking issues. These materials exhibit attractive dielectric value, but there are problems replacing conventional SiO2, because of their chemical, mechanical and electrical instability after plasma p…
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Date:
May 2006
Creator:
Nerusu, Pawan Kumar
Partner:
UNT Libraries