Practical superconductor development for electrical power applications : annual report for FY 2001. Page: 19 of 88
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Laser Beam
Sample Stage
Substrate
Na
Rotating Target Plume
Fig. 9. Experimental setup for the inclined substrate deposition (ISD) of
YBCO films directly on Ag substrates.
Ion Beam Assisted Deposition (IBAD) of Yttria-Stabilized Zirconia (YSZ)
Mechanically polished HC pieces measuring ~0.1-mm thick, 1-cm long, and
~5-mm wide were used as substrates for IBAD of YSZ and subsequent YBCO
deposition. Thin YSZ buffer films were grown from sintered YSZ pieces using
an e-beam evaporator. Polished HC substrates were attached to a water-cooled
sample stage with vacuum silver paste. The Ar+ ion beam, at an incident angle
of 550 with respect to the substrate normal, was generated by an 8-cm Kaufman
source operating at 300 eV. A Faraday cup (Kimball Physics FC-70A) was used
to measure the beam intensity before each deposition. Base pressure of the
deposition chamber was 2 x 10-7 torr, and an operating pressure of ~4 x 10-4 torr
was maintained with a flowing 10:1 argon-oxygen mixture and a cryogenic
pump. A quartz crystal monitor was mounted beside the sample stage to
monitor the deposition rate. Circulating water flowed through the sample stage
to dissipate heat generated by the ion source and maintain the substrate
temperature below 100 C during the deposition. Without cooling water, the
substrate temperature would rise to >250 C.
YBCO films of 300- to 1000-nm thickness were deposited by PLD with a
Lambda Physik COMPex 201 excimer laser with a Kr-F2 gas premixture as the
lasing medium. Commercial YBCO targets (Superconductive Components, Inc.,
Columbus, OH) of 25.4 mm in diameter and 6.4-mm thick were used. Substrates
were attached to a heatable sample stage with silver paste and heated to ~800 C
during deposition. The laser spot focused at the rotating target was 2-3 mm in
diameter, which resulted in an energy density of ~2 J/cm2. Distance between the
target and the substrates was 7 cm. The desired oxygen partial pressure (in the11
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Cha, Y. S.; Dorris, S. E.; Dusek, J. T.; Emerson, J. E.; Erck, R. A.; Fisher, B. L. et al. Practical superconductor development for electrical power applications : annual report for FY 2001., report, May 2, 2002; Illinois. (https://digital.library.unt.edu/ark:/67531/metadc737902/m1/19/: accessed July 17, 2024), University of North Texas Libraries, UNT Digital Library, https://digital.library.unt.edu; crediting UNT Libraries Government Documents Department.