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Meso-scale Machining Capabilities and Issues
Gilbert L. Benavides, David P Adams, Pin Yang
Sandia National Laboratories, P.O. Box 5800, MS 0958, Albuquerque, NM -
87185
ABSTRACT
Meso-scale manufacturing processes are bridging the gap between silicon-
based MEMS processes and conventional miniature machining. These
processes can fabricate two and three-dimensional parts having micron size
features in traditional materials such as stainless steels, rare earth magnets,
ceramics, and glass. Meso-scale processes that are currently available
include, focused ion beam sputtering, micro-milling, micro-turning, excimer
laser ablation, femto-second laser ablation, and micro electro discharge
machining. These meso-scale processes employ subtractive machining
technologies (i.e., material removal), unlike LIGA, which is an additive meso-
scale process. Meso-scale processes have different material capabilities and
machining performance specifications. Machining performance specifications
of interest include minimum feature size, feature tolerance, feature location
accuracy, surface finish, and material removal rate. Sandia National
Laboratories is developing meso-scale electro-mechanical components, which
require meso-scale parts that move relative to one another. The meso-scale
parts fabricated by subtractive meso-scale manufacturing processes have
unique tribology issues because of the variety of materials and the surface
conditions produced by the different meso-scale manufacturing processes.
INTRODUCTION
Sandia National Laboratories has a need to machine meso-scale features in
a variety of materials. In the past, Sandia has developed precision miniature-
scale electro-mechanical components. Presently, Sandia has been developing
functionally similar electro-mechanical components using technologies such
as silicon based MEMS and LIGA. The authors recognized that there was a
void in our ability to fabricate meso-scale parts and features. There is also a
need to machine meso-scale features in traditional engineering materials like
stainless steels, ceramic and rare earth magnets. Examples of meso-scale
features are, fillets, spherical radii, contours, holes, and channels. Figure 1 is
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BENAVIDES,GILBERT L.; ADAMS,DAVID P. & YANG,PIN. Meso-scale machining capabilities and issues, article, May 15, 2000; Albuquerque, New Mexico. (https://digital.library.unt.edu/ark:/67531/metadc702211/m1/1/: accessed July 18, 2024), University of North Texas Libraries, UNT Digital Library, https://digital.library.unt.edu; crediting UNT Libraries Government Documents Department.