Selective, pulsed CVD of platinum on microfilament gas sensors Metadata

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Title

  • Main Title Selective, pulsed CVD of platinum on microfilament gas sensors

Creator

  • Author: Manginell, Ronald P.
    Creator Type: Personal
  • Author: Smith, James H.
    Creator Type: Personal
  • Author: Ricco, Antonio J.
    Creator Type: Personal
  • Author: Moreno, Daniel J.
    Creator Type: Personal
  • Author: Hughes, Robert C.
    Creator Type: Personal
    Creator Info: Sandia National Labs., Albuquerque, NM (United States)
  • Author: Huber, Robert J.
    Creator Type: Personal
    Creator Info: Utah Univ., Salt Lake City, UT (United States)
  • Author: Senturia, Stephen D.
    Creator Type: Personal
    Creator Info: Massachusetts Inst. of Tech., Cambridge, MA (United States)

Contributor

  • Sponsor: United States. Department of Energy.
    Contributor Type: Organization
    Contributor Info: USDOE, Washington, DC (United States)

Publisher

  • Name: Sandia National Laboratories
    Place of Publication: Albuquerque, New Mexico
    Additional Info: Sandia National Labs., Albuquerque, NM (United States)

Date

  • Creation: 1996-05-01

Language

  • English

Description

  • Content Description: A post-processing, selective micro-chemical vapor deposition (``micro-CVD``) technology for the deposition of catalytic films on surface-micromachined, nitride-passivated polysilicon filaments has been investigated. Atmospheric pressure deposition of Pt on microfilaments was accomplished by thermal decomposition of Pt acetylacetonate; deposition occurs selectively only on those filaments which are electrically heated. Catalyst morphology, characterized by SEM, can be controlled by altering deposition time, filament temperature, and through the use of pulsed heating of the filament during deposition. Morphology plays an important role in determining the sensitivity of these devices when used as combustible gas sensors.
  • Physical Description: 6 p.

Subject

  • Keyword: Flammability
  • Keyword: Platinum
  • Keyword: Gases
  • Keyword: Gas Analysis
  • Keyword: Miniaturization
  • Keyword: Detection
  • STI Subject Categories: 40 Chemistry
  • Keyword: Filaments
  • STI Subject Categories: 44 Instrumentation, Including Nuclear And Particle Detectors
  • Keyword: Silicon

Source

  • Conference: Solid-state sensor and actuator workshop, Hilton Head, SC (United States), 2-6 Jun 1996

Collection

  • Name: Office of Scientific & Technical Information Technical Reports
    Code: OSTI

Institution

  • Name: UNT Libraries Government Documents Department
    Code: UNTGD

Resource Type

  • Article

Format

  • Text

Identifier

  • Other: DE96009172
  • Report No.: SAND--96-0965C
  • Report No.: CONF-960673--3
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 231188
  • Archival Resource Key: ark:/67531/metadc666334

Note

  • Display Note: OSTI as DE96009172
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