Monte Carlo Modeling of Thin Film Deposition: Factors that Influence 3D Islands Metadata

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Title

  • Main Title Monte Carlo Modeling of Thin Film Deposition: Factors that Influence 3D Islands

Creator

  • Author: Gilmer, G H
    Creator Type: Personal
  • Author: Dalla Torre, J
    Creator Type: Personal
  • Author: Baumann, F H
    Creator Type: Personal
  • Author: Diaz de la Rubia, T
    Creator Type: Personal

Contributor

  • Sponsor: United States. Department of Energy.
    Contributor Type: Organization
    Contributor Info: USDOE

Publisher

  • Name: Lawrence Livermore National Laboratory
    Place of Publication: Livermore, California
    Additional Info: Lawrence Livermore National Laboratory (LLNL), Livermore, CA

Date

  • Creation: 2002-01-04

Language

  • English

Description

  • Content Description: In this paper we discuss the use of atomistic Monte Carlo simulations to predict film microstructure evolution. We discuss physical vapor deposition, and are primarily concerned with films that are formed by the nucleation and coalescence of 3D islands. Multi-scale modeling is used in the sense that information obtained from molecular dynamics and first principles calculations provide atomic interaction energies, surface and grain boundary properties and diffusion rates for use in the Monte Carlo model. In this paper, we discuss some fundamental issues associated with thin film formation, together with an assessment of the sensitivity of the film morphology to the deposition conditions and materials properties.
  • Physical Description: PDF-file: 7 pages; size: 10.6 Mbytes

Subject

  • Keyword: Sensitivity
  • Keyword: Diffusion
  • Keyword: Physical Vapor Deposition
  • STI Subject Categories: 36
  • Keyword: Simulation
  • Keyword: Coalescence
  • Keyword: Nucleation
  • Keyword: Deposition
  • Keyword: Microstructure
  • Keyword: Morphology
  • Keyword: Thin Films

Source

  • Conference: 2002 International Conference on Computational Nanoscience and Nanotechnology, San Juan, Puerto Rico, Apr 22 - Apr 25, 2002

Collection

  • Name: Office of Scientific & Technical Information Technical Reports
    Code: OSTI

Institution

  • Name: UNT Libraries Government Documents Department
    Code: UNTGD

Resource Type

  • Article

Format

  • Text

Identifier

  • Report No.: UCRL-JC-146710
  • Grant Number: W-7405-ENG-48
  • Office of Scientific & Technical Information Report Number: 15004119
  • Archival Resource Key: ark:/67531/metadc1407354
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