Deposition of silicon carbide coatings on particles in a fluidized bed using silane and tetramethylsilane: a feasibility study Page: 1 of 23
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Deposition of silicon carbide coatings on particles in a fluidized bed using silane and tetramethylsilane: a feasibility study, report, March 1, 1978; Tennessee. (https://digital.library.unt.edu/ark:/67531/metadc1061628/m1/1/: accessed July 16, 2024), University of North Texas Libraries, UNT Digital Library, https://digital.library.unt.edu; crediting UNT Libraries Government Documents Department.