Reported nearly a decade ago, cyclic fatigue failure in silicon thin films has remained a mystery. Silicon does not display the room temperature plasticity or extrinsic toughening mechanisms necessary to cause fatigue in either ductile (e.g., metals) or brittle (e.g., ceramics and ordered mintermetallic) materials.
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Ernest Orlando Lawrence Berkeley National Lab., CA (United States)
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Reported nearly a decade ago, cyclic fatigue failure in silicon thin films has remained a mystery. Silicon does not display the room temperature plasticity or extrinsic toughening mechanisms necessary to cause fatigue in either ductile (e.g., metals) or brittle (e.g., ceramics and ordered mintermetallic) materials.
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Muhlstein, C. L.; Stach, E. A. & Ritchie, R. O.Mechanism of fatigue in micron-scale films of polycrystalline silicon for microelectromechanical applications,
article,
August 2, 2001;
California.
(https://digital.library.unt.edu/ark:/67531/metadc739257/:
accessed April 26, 2024),
University of North Texas Libraries, UNT Digital Library, https://digital.library.unt.edu;
crediting UNT Libraries Government Documents Department.