Deep x-ray lithography for micromechanics
Description:
Extensions of the German LIGA process have brought about fabrication capability suitable for cost effective production of precision engineered components. The process attributes allow fabrication of mechanical components which are not capable of being made via conventional subtractive machining methods. Two process improvements have been responsible for this extended capability which involve the areas of thick photoresist application and planarization via precision lapping. Application of low-s…
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Date:
August 1995
Creator:
Christenson, T. R. & Guckel, H.
Item Type:
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Partner:
UNT Libraries Government Documents Department