Actinic Mask Inspection at the Als: Risk Reduction Activities for 2003
Description:
This document reports on risk reduction activities performed at the VNL during CY2003 as a part of the Lith-343 actinic inspection project funded by International SEMATECH. The risk reduction activities described in this document comprise deliverable items 3.1.3, 3.1.4, 3.1.5 and 3.1.6 of Amendment 6 to the VNL EUV mask blank technology transfer contract.
Date:
January 5, 2004
Creator:
Barty, A.; Levesque, R.; Ayers, J.; Liu, Y.; Gullikson, E. & Barale, P.
Partner:
UNT Libraries Government Documents Department