Design Considerations Of Ultrahigh Vacuum Systems For Metallurgical Applications
Description:
Under the stimulus of electronic materials development - particularly thin-film studies - and the need for space environmental simulation chambers, a very rapid increase in the availability of industrial-sized vacuum components and systems operable in the ultrahigh vacuum range has taken place in the last three years. It is the purpose of this paper to explore the design considerations of ultrahigh vacuum systems for metallurgical applications.
Date:
June 10, 1964
Creator:
Batzer, Thomas H. & Bunshah, R. F. (Rointan Framroze)
Item Type:
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Partner:
UNT Libraries Government Documents Department