Effects of Hydrogen in the Annealing Environment on Photoluminescence from Si Nanoparticles in SiO(2)
Description:
The role of hydrogen in enhancing the photoluminescence (PL) yield observed from Si nanocrystals embedded in SiO{sub 2} has been studied. SiO{sub 2} thermal oxides and bulk fused silica samples have been implanted with Si and subsequently annealed in various ambients including hydrogen or deuterium forming gases (Ar+4%H{sub 2} or Ar+4%D{sub 2}) or pure Ar. Results are presented for annealing at temperatures between 200 and 1100 C. Depth and concentration profiles of H and D at various stages of…
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Date:
March 23, 1999
Creator:
Barbour, J. C.; Budai, J. D.; Hembree, D. M.; Meldrum, A.; White, C. W. & Withrow, S. P.
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