PLASMA WINDOW FOR VACUUM - ATMOSPHERE INTERFACE AND FOCUSING LENS OF SOURCES FOR NON-VACUUM MATERIAL MODIFICATION.
Description:
Material modifications by ion implantation, dry etching, and micro-fabrication are widely used technologies, all of which are performed in vacuum, since ion beams at energies used in these applications are completely attenuated by foils or by long differentially pumped sections, which ate currently used to interface between vacuum and atmosphere. A novel plasma window, which utilizes a short arc for vacuum-atmosphere interface has been developed. This window provides for sufficient vacuum atmos…
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Date:
September 7, 1997
Creator:
Hershcovitch, A.
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UNT Libraries Government Documents Department