The chemistry of halogens on diamond: effects on growth and electron emission
Description:
Diamond growth using halogenated precursors was studied in several diamond growth reactors. In a conventionao plasma reactor, diamond growth using the following gas mixtures was studied: CF{sub 4}/H{sub 2}, CH{sub 4}/H{sub 2}, CH{sub 3}F/H{sub 2}, and CH{sub 3}CL/H{sub 2}. Both the diamond growth measurements demonstrated ineffective transport of halogen radicals to the diamond surface during the growth process. In order to transport radical halogen species to the diamond surface during growth,…
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Date:
February 1, 1997
Creator:
Hsu, W. L.; Pan, L. S. & Brown, L. A.
Item Type:
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Partner:
UNT Libraries Government Documents Department