Particle transport in plasma reactors
Description:
SEMATECH and the Department of Energy have established a Contamination Free Manufacturing Research Center (CFMRC) located at Sandia National Laboratories. One of the programs underway at the CFMRC is directed towards defect reduction in semiconductor process reactors by the application of computational modeling. The goal is to use fluid, thermal, plasma, and particle transport models to identify process conditions and tool designs that reduce the deposition rate of particles on wafers. The prog…
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Date:
January 1, 1995
Creator:
Rader, D. J.; Geller, A. S.; Choi, Seung J. & Kushner, M. J.
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Partner:
UNT Libraries Government Documents Department