Structural characterization of the thermal evolution of tetrahedrally coordinated amorphous carbon films
Description:
The authors present the results of a post-deposition annealing structural study on amorphous tetrahedrally-coordinated carbon (a-tC) films on Si(100) prepared by pulsed-laser deposition. Films as-deposited and post-annealed at 200, 300, 400, 500 and 600 C, respectively, are studied using combined X-ray reflectivity and low-angle scattering measurements. The scans are fit to the Fresnel equations to obtain values for average film density, film and interface thickness, and film and interface roug…
more
Date:
December 1, 1997
Creator:
Martinez-Miranda, L.J.; Sullivan, J.P.; Friedmann, T.A.; Siegal, M.P. & DiNardo, N.J.
Item Type:
Refine your search to only
Article
Partner:
UNT Libraries Government Documents Department