Description: The processing of materials using rf and/or microwave power is a broad area that has grown significantly in the past few years. The authors have applied rf and microwave technology in the areas of ceramic sintering, plasma processing, and waste processing. The sintering of ceramics in the frequency range of 50 MHz-28 GHz has lead to unique material characteristics compared to materials that have been sintered conventionally. It has been demonstrated that sintering can be achieved in a variety of materials, including alumina, zirconia, silicon carbide, and boron carbide. In the area of plasma processing, progress has been made in the development and understanding of high density plasma sources, including inductively coupled plasma (ICP) sources. The effects of processing conditions on the ion energy distribution at the substrate surface (a critical processing issue) have been determined for a variety of process gases. The relationship between modeling and experiment is being established. Microwave technology has also been applied to the treatment of radioactive and chemical waste. The application of microwaves to the removal of contaminated concrete has been demonstrated. Details of these programs and other potential application areas are discussed.
Date: December 1, 1995
Creator: Caughman, J.B.O.; Baity, F.W.; Bigelow, T.S.; Gardner, W.L.; Hoffman, D.J.; Forrester, S.C. et al.
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